Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2005-10-25
2005-10-25
Dougherty, Thomas M. (Department: 2834)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S365000
Reexamination Certificate
active
06958566
ABSTRACT:
A mechanical resonator device which has a phenomena-dependent electrical stiffness is provided. The phenomena may be temperature or acceleration, for example. The device includes a substrate and a resonator supported above the substrate by supports. The device further includes an electrode supported above the substrate adjacent the resonator by supports to obtain an electrode-to-resonator gap wherein electrical stiffness generated across the gap is phenomena-dependent to take instability of resonant frequency of the device caused by the phenomena into consideration.
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Hsu Wan-Thai
Nguyen Clark T.-C.
Dougherty Thomas M.
The Regents of the University of Michigan
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