Mechanical resonator arrangements

Details Mechanical resonator arrangements Mechanical resonator arrangements

1979-06-08

1981-12-15

Myracle, Jerry W.

Measuring and testing

Vibration

Sensing apparatus

G01D 2100

Patent

active

043052983

ABSTRACT:
Semiconductor transducer devices are provided, some being formed from a single crystal and having a flexible portion which is vibratable. Also a multi-element is disclosed which is a body including mechanical semiconductor resonator. The body has a transverse valley across its width. A comb-like array of flexible silicon cantilevers extend from one end of the body. Each cantilever is adapted to respond to a periodic force such that each has a different vibrational frequency. An alternative embodiment includes an accelerometer having a block with a three cantilever array with a semiconductor filament fixed in tension between each adjacent pair. The middle cantilever is longer than the other two. A further alternative employs elements to support a crystal at two nodal points of vibration.

REFERENCES:
patent: 3224279 (1965-12-01), Galli et al.
patent: 3400274 (1968-09-01), Hawkins

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