Mechanical probe for optical measurement of electrical potential

Details Mechanical probe for optical measurement of electrical potential Mechanical probe for optical measurement of electrical potential

1988-04-28

1990-03-13

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

Using radiant energy

324158R, 350356, 350376, G01R 1900, G01R 3100, G02F 109

Patent

active

049085689

ABSTRACT:
A mechanical probe for optical measurement of electrical potentials. The probe of the present invention is composed of a cubic, electro-optical crystal fashioned in the form of a tip and of a metallization which is at ground potential and which covers the crystal with the exception of those surface regions located immediately opposite a measuring location, for example an interconnect of an integrated circuit. Since the metallization acting as a cooperating electrode significantly facilitates the penetration of the electrical stray field into the crystal tip, geometry-dependent effects and influences of electrical microfields are nearly completely supressed. The probe therefore makes it possible to utilize the voltage difference instead of the topography-dependent field difference for optical measurement of electrical signals with high chronological resolution.

REFERENCES:
patent: 4269483 (1981-05-01), Feldtkeller
patent: 4465969 (1984-08-01), Tada et al.
patent: 4631402 (1986-12-01), Nagatsuma et al.
"Noncontact Electro-Optic Sampling with a Gallium Arsenide Injection Laser" by Nees, et al., Electronic Letters, vol. 22, No. 17, Aug. 14, 1986, pp. 918-919.
"Subpicosecond Electrical Sampling and Applications" by Valdmanis et al. in Picosecond Optoelectronic Devices, Academic Press, Inc., 1984, pp. 249 through 270.
Valdmanis et al.; "Electro-Optic . . . "; Laser Focus/Electro-Optics; Feb. 1986; pp. 84, 85, 86, 88, 90, 92, 94, 96.

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