Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specified electrical sensor or system
Reexamination Certificate
2005-02-01
2005-02-01
Williams, Hezron (Department: 2856)
Measuring and testing
Specimen stress or strain, or testing by stress or strain...
Specified electrical sensor or system
C073S862451, C073S862471, C073S862621, C073S862627, C073S862632
Reexamination Certificate
active
06848320
ABSTRACT:
A mechanical deformation amount sensor includes a sensor structure which is formed by a semiconductor substrate or an insulating substrate and integrally includes a deformation portion deformable, when a physical quantity to be detected is applied to the sensor structure, due to the physical quantity and a support portion for supporting the deformation portion, a carbon nanotube resistance element which is provided on the deformation portion so as to be mechanically deformed in response to deformation of the deformation portion and a wiring pattern which is formed in a pattern on the sensor structure so as to be connected to the carbon nanotube resistance element. By applying a voltage to the carbon nanotube resistance element via the wiring pattern, a change of electrical conductivity of the carbon nanotube resistance element upon mechanical deformation of the carbon nanotube resistance element is fetched as an electrical signal.
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English Language Abstract of JP 11-241903.
Arakawa Masao
Miyajima Hisakazu
Sakai Jun
Yabuta Akira
Greenblum & Bernstein P.L.C.
Matsushita Electric & Works Ltd.
Rogers David A.
Williams Hezron
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