Mechanical capture of count wafer for particle analysis

Details Mechanical capture of count wafer for particle analysis Mechanical capture of count wafer for particle analysis

1993-12-23

1995-03-28

Williams, Hezron E.

Electricity: measuring and testing

Determining nonelectric properties by measuring electric...

Particle counting

G01N 1506, G01N 2706

Patent

active

054020620

ABSTRACT:
A particle count probe comprises a wafer having an aperture. A first member is provided having a fluid passageway. A second member is removably mounted to the first member, and cooperates with the first member and the wafer to position the wafer so that the aperture of the wafer aligns with the fluid passageway.

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