Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2005-08-30
2005-08-30
Glick, Edward J. (Department: 2882)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
06937345
ABSTRACT:
A measuring system, for measuring performance of an imaging optical system by use of an interferometer, includes (i) an interferometer arranged to measure transmission wavefronts separately or sequentially, in relation to at least one of plural measurement points defined along a plane perpendicular to an optical axis of the imaging optical system, wherein position coordinates of object side and image side imaging points of the plural measurement points are measured, and (ii) a computing unit being communicated with the interferometer. The computing unit is operable to calculate a wavefront as measured by the interferometer and at least one of a wavefront aberration and an imaging state of the imaging optical system, and to correct a measured value related to at least one of a wavefront aberration and an imaging state of the imaging optical system at another measurement point, while taking, as a reference, at least one of a wavefront aberration and an imaging state at a standard point set along a plane perpendicular to the optical axis.
REFERENCES:
patent: 5815268 (1998-09-01), LaFleur
patent: 5838442 (1998-11-01), Bray
patent: 5898501 (1999-04-01), Suzuki et al.
patent: 6473186 (2002-10-01), Kawasaki et al.
patent: 6480284 (2002-11-01), Stenton
patent: 6614535 (2003-09-01), Kakuchi et al.
patent: 2001/0001577 (2001-05-01), Ukaji
Artman Thomas R
Glick Edward J.
LandOfFree
Measuring system for measuring performance of imaging... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Measuring system for measuring performance of imaging..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Measuring system for measuring performance of imaging... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3446350