Measuring sub-wavelength displacements

Details Measuring sub-wavelength displacements Measuring sub-wavelength displacements

2007-10-16

2007-10-16

Bella, Matthew C. (Department: 2624)

Image analysis

Image compression or coding

Transform coding

C427S248100, C428S328000

Reexamination Certificate

active

10931647

ABSTRACT:
Measurement systems and methods extend the use of optical navigation to measure displacements smaller than a wavelength of the light used to capture images of an object measured. Nanometer-scale movements can thus be measured, for example, in equipment used for manufacture of integrated circuits or nanometer scale devices.

REFERENCES:
patent: 4805123 (1989-02-01), Specht et al.
patent: 5548326 (1996-08-01), Michael et al.
patent: 6546120 (2003-04-01), Etoh et al.
patent: 2002/0179819 (2002-12-01), Nahum
patent: 2004/0085540 (2004-05-01), Lapotko et al.
patent: 2006/0012798 (2006-01-01), Jones et al.
patent: 0659021 (1995-06-01), None
patent: 0999521 (2000-05-01), None
patent: WO 02/097535 (2002-12-01), None

Affiliated with

Also associated with

Rating

Measuring sub-wavelength displacements does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Measuring sub-wavelength displacements, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Measuring sub-wavelength displacements will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3840018