Measuring process and arrangement for the three-dimensional posi

Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems

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2502062, 21912178, G01J 120

Patent

active

051665050

ABSTRACT:
A process and apparatus for three-dimensional position control of the focal point of a high-energy laser beam by measuring its directional and focal point deviation. A portion of the energy of the laser beam is split off by means of a beam splitter extending over the whole cross-section of the laser beam and is focussed on a quadrant detector by means of an optical system which introduces an astigmatic aberration. The various patterns and pattern positions generated on the quadrant detector as a function of the defocussing and directional deviation are analyzed by means of an electronic system, and corresponding control signals are generated.

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patent: 4929823 (1990-05-01), Kato et al.
Sensor Review, 10(1) pp. 35-37-Industrial application for optical profilometry, Jan. 1990.
Optical Readout of Viedodisc.-IEEE transactions on consumer electronics, Nov. 1976.

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