Measuring method including measuring angle of concave...

Details Measuring method including measuring angle of concave... Measuring method including measuring angle of concave...

2011-06-28

2011-06-28

Stafira, Michael P (Department: 2886)

Optics: measuring and testing

Dimension

Reexamination Certificate

active

07969584

ABSTRACT:
The measuring method for providing a precise determination of a geometry of a concave portion is provided. The measuring method includes: measuring an angle of a side wall of a concave portion with a bottom surface thereof formed in an insulating film (operation S1); defining a plurality of parameter groups including an angle of the side wall of the concave portion with the bottom surface, a dimensional width and a dimensional depth and preparing library containing a plurality of waveforms of reflected lights respectively correlated with such plurality of parameter groups (operation S2); an operation of irradiating light over the concave portion (operation S4); an operation of detecting reflected light (operation S5); referencing the waveform of reflected light with the waveform selected from the library (operation S6); and when a difference between the waveform of reflected light and the waveform selected from the library is lower than a specified value, then assigning the parameter such as the dimensional width of the concave portion and the like correlated with the selected waveform for an optimum value to determine the geometry of the concave portion. The angle of the side wall of the concave portion with the bottom surface thereof in the parameter groups of the library is a measured angle in the operation S1.

REFERENCES:
patent: 6483580 (2002-11-01), Xu et al.
patent: 6785009 (2004-08-01), Stirton et al.
patent: 6986280 (2006-01-01), Muckenhirm
patent: 2002/0033945 (2002-03-01), Xu et al.
patent: 2003/0058443 (2003-03-01), Xu et al.
patent: 2003/0133104 (2003-07-01), Niu et al.
patent: 2004/0070772 (2004-04-01), Shchegrov et al.
patent: 2002-506198 (2002-02-01), None
patent: 2004-510152 (2004-04-01), None
patent: 2006-512561 (2006-04-01), None

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