Chemistry: analytical and immunological testing – Halogen containing
Reexamination Certificate
2007-02-20
2007-02-20
Cole, Monique T. (Department: 1743)
Chemistry: analytical and immunological testing
Halogen containing
C436S164000
Reexamination Certificate
active
09822211
ABSTRACT:
The present invention provided a method for measuring a halogen gas and/or a hydrofluorocarbon for the purpose of controlling the concentration of the halogen gas and/or the hydrofluorocarbon, in a plant producing a halogen compound or a perfluorocarbon, at a predetermined concentration level quickly, easily, and precisely for the control. The present invention provides also a measurement apparatus for the above measurement which has a compact structure, and in which the parts are exchangeable quickly and readily. The present invention provides further a process for producing a halogen compound or a perfluorocarbon employing the measurement method and the measurement apparatus.In particular, the present invention intends to provide a method for measuring safely and quickly a hydrofluorocarbon concentration in a mixed gas stream in a process of producing a perfluorocarbon by direct fluorination reaction of a hydrofluorocarbon and F2.
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Kaga Kazunari
Matsuda Itsuaki
Ohi Toshio
Ohno Hiromoto
Tachi Ryuichi
Cole Monique T.
Showa Denko K.K.
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