Measuring method and measuring apparatus

Data processing: measuring – calibrating – or testing – Calibration or correction system – Error due to component compatibility

Reexamination Certificate

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C033S702000

Reexamination Certificate

active

07117110

ABSTRACT:
In a measuring apparatus, a plurality of design values in design values substituted in the correction computation equations for correcting a geometrical measurement error inherent in the measuring apparatus are set as variables, the variables are optimized by a numerical solution to obtain optimized correction computation equations. A measured value is computed by using the optimized correction computation equations obtained. For optimization of the variables, a master work is measured and the variables are adjusted so that a measurement error is minimized.

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European Search Report issued Dec. 21, 2004.

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