Measuring method and apparatus using shearing...

Optics: measuring and testing – By light interference – Having shearing

Reexamination Certificate

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C356S515000, C356S521000

Reexamination Certificate

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10994331

ABSTRACT:
A measuring method for measuring a wave front of light, which has passed through a target optical system. The method includes the steps of dividing the light that passes the target optical system into a first wave front and a second wave front made by offsetting the first wave front by a predetermined amount in a predetermined direction, obtaining information concerning an interference fringe using shearing interference with divided light, calculating a differential wave front between the first wave front and the second wave front by using the information concerning the interference fringe obtained in the obtaining step, and correcting the differential wave front based on the predetermined amount and a wave number in the predetermined direction.

REFERENCES:
patent: 5067811 (1991-11-01), Ouchi
patent: 6322220 (2001-11-01), Sano et al.
patent: 6661522 (2003-12-01), Ouchi
patent: 6774982 (2004-08-01), Ouchi
patent: 6853442 (2005-02-01), Ouchi
patent: 2004/0085548 (2004-05-01), Ouchi
patent: 2000-146705 (2000-05-01), None

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