Optics: measuring and testing – By light interference – Having shearing
Reexamination Certificate
2007-08-07
2007-08-07
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
By light interference
Having shearing
C356S515000, C356S521000
Reexamination Certificate
active
10994331
ABSTRACT:
A measuring method for measuring a wave front of light, which has passed through a target optical system. The method includes the steps of dividing the light that passes the target optical system into a first wave front and a second wave front made by offsetting the first wave front by a predetermined amount in a predetermined direction, obtaining information concerning an interference fringe using shearing interference with divided light, calculating a differential wave front between the first wave front and the second wave front by using the information concerning the interference fringe obtained in the obtaining step, and correcting the differential wave front based on the predetermined amount and a wave number in the predetermined direction.
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patent: 2000-146705 (2000-05-01), None
Richey Scott M.
Toatley , Jr. Gregory J.
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