Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2007-10-16
2007-10-16
Connolly, Patrick (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S521000
Reexamination Certificate
active
10996381
ABSTRACT:
A measuring method for measuring an interference fringe includes the steps of generating a reference wave as a result of transmission through a slit or pinhole in a mask of a portion of light that has passed a target optical system, generating the interference fringe between the reference wave and a wave of another portion of light that has passed the target optical system and contains aberration information of the target optical system, determining whether contrast of the interference fringe is higher than a predetermined threshold, and exchanging the pinhole or the slit when the contrast is below the predetermined threshold.
REFERENCES:
patent: 4832489 (1989-05-01), Wyant et al.
patent: 5457533 (1995-10-01), Wilcken
patent: 5657125 (1997-08-01), Kato et al.
patent: 5835217 (1998-11-01), Medecki
patent: 6151115 (2000-11-01), Naulleau
patent: 6195169 (2001-02-01), Naulleau et al.
patent: 6312373 (2001-11-01), Ichihara
patent: 6456382 (2002-09-01), Ichihara et al.
patent: 6559952 (2003-05-01), Bokor et al.
patent: 6765683 (2004-07-01), Ichihara
patent: 2001/0028462 (2001-10-01), Ichihara et al.
patent: 2002/0191195 (2002-12-01), Ichihara et al.
patent: 2003/0215053 (2003-11-01), Ichihara
patent: 1 063 570 (2000-12-01), None
patent: 57-64139 (1982-04-01), None
patent: 2000-97666 (2000-04-01), None
European Search Report dated Nov. 3, 2005, issued in corresponding European patent appln. No. EP 04 25 7382, forwarded in a Communication dated Nov. 25, 2005.
Optical Shop Testing, ed. by Daniel Malacara. “Chapter 8. Foucault, Wire, and Phase Modulation Tests,” by J. Ojeda-Castañeda, and “Chapter 9. Ronchi Test” by A. Cornejo-Rodriguez, 1978: John Wiley and Sons, New York. pp. 231-322.
Communication pursuant to Article 96(2) EPC dated Feb. 7, 2007, issued in corresponding European patent application No. 04 257 382.4.
Canon Kabushiki Kaisha
Connolly Patrick
Fitzpatrick ,Cella, Harper & Scinto
LandOfFree
Measuring method and apparatus using interference, exposure... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Measuring method and apparatus using interference, exposure..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Measuring method and apparatus using interference, exposure... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3867413