Measuring method, adjustment method for stage movement...

Details Measuring method, adjustment method for stage movement... Measuring method, adjustment method for stage movement...

2009-03-26

2011-12-06

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S052000

Reexamination Certificate

active

08072579

ABSTRACT:
Provided is a measuring method including: transferring a measuring mark disposed on an original to a substrate at a plurality of locations; moving a substrate stage for holding the substrate so that the substrate is rotated by 90 degrees about a rotation axis parallel to an optical axis of a projection optical system; then transferring the measuring mark to the substrate at a plurality of locations so that the measuring mark overlaps the transfer region; measuring positional deviations among the transferred measuring marks and a first overlap mark in a region where the transfer regions overlap each other; and calculating at least one of a positional error of a shot on the substrate, a rotational error of the same, and an orthogonality in shot arrangement based on a result of the measurement.

REFERENCES:
patent: 6563565 (2003-05-01), Nishi
patent: 7084957 (2006-08-01), Fukagawa
patent: 7894039 (2011-02-01), Miyashiro et al.
patent: 2005-64268 (2005-03-01), None

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