Measuring layer thickness or composition changes

Details Measuring layer thickness or composition changes Measuring layer thickness or composition changes

2007-10-02

2007-10-02

Tsai, Carol S. W. (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Dimensional determination

Reexamination Certificate

active

11262868

ABSTRACT:
A method of measuring the thickness or the rate of change of thickness of a layer as the layer is being formed on a substrate, includes illuminating the layer through the substrate with low coherence light that transmits through the layer; collecting a portion of the reflected light from each optical interface of the substrate and layer with a low coherence interferometer; and, calculating the thickness or the rate of change of thickness of the layer according to the obtained interferometric data.

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