Radiant energy – Irradiation of objects or material
Reexamination Certificate
2011-05-03
2011-05-03
Johnston, Phillip A (Department: 2881)
Radiant energy
Irradiation of objects or material
C362S243000, C315S291000
Reexamination Certificate
active
07935940
ABSTRACT:
Consistent ultraviolet (UV) intensity for a semiconductor UV cure chamber is measured in-situ with a hot pedestal in vacuum by measuring reflected UV light from a calibration substrate at a UV detector mounted in the lamp assembly. The measurement apparatus includes a UV detector, a cover that protects the detector from UV light while not in use, and a mirror disposed between the chamber window and the UV detector. Measured UV intensity from the substrate reflection and from the mirror reflection help determine a course of maintenance action to maintain wafer-to-wafer uniformity.
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Johnston Phillip A
Novellus Systems Inc.
Weaver Austin Villeneuve & Sampson LLP
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