Measuring in-situ UV intensity in UV cure tool

Radiant energy – Irradiation of objects or material

Reexamination Certificate

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C362S243000, C315S291000

Reexamination Certificate

active

07935940

ABSTRACT:
Consistent ultraviolet (UV) intensity for a semiconductor UV cure chamber is measured in-situ with a hot pedestal in vacuum by measuring reflected UV light from a calibration substrate at a UV detector mounted in the lamp assembly. The measurement apparatus includes a UV detector, a cover that protects the detector from UV light while not in use, and a mirror disposed between the chamber window and the UV detector. Measured UV intensity from the substrate reflection and from the mirror reflection help determine a course of maintenance action to maintain wafer-to-wafer uniformity.

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