Measuring element for a flow sensor

Details Measuring element for a flow sensor Measuring element for a flow sensor

1996-03-26

1997-12-30

Chilcot, Richard

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

057032874

ABSTRACT:
In a measuring element for a flow sensor and a method for manufacturing the measuring element, a heater, a temperature sensor, and a printed circuit trace are patterned out of a platinum layer. Furthermore, an interconnection region is used for contacting the measuring chip with bonding wires. An additional metal layer is provided for the interconnection region.

REFERENCES:
patent: 4888988 (1989-12-01), Lee et al.
patent: 4952904 (1990-08-01), Johnson et al.

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