Measuring device utilizing a thermo-electromotive element

Details Measuring device utilizing a thermo-electromotive element Measuring device utilizing a thermo-electromotive element

1995-04-26

1997-05-13

Chilcot, Richard

Measuring and testing

Volume or rate of flow

Thermal type

7320411, G01F 168

Patent

active

056294824

ABSTRACT:
To provide a flow rate sensor of minimized power consumption.
Form a Fe pattern 104 and Pt pattern 103 on the surface of a diamond thin film 101 by sputtering or evaporation to construct a thermo-electromotive element. Also, form a heating unit 102. On pulsewise heating from the heating unit 102, the temperature of the junction portions 109 becomes higher than that of the junction portions 110 and an output from the thermo-electromotive element is obtained as thermo-electromotive force between the electrodes 107 and 108. This output indicates a response characteristic reflecting the thermal effect exerted from the environment on the diamond thin film. From this output, for example, the flow rate of a fluid flowing in contact with the diamond thin film 101 can be obtained.

REFERENCES:
patent: 4478077 (1984-10-01), Bohrer et al.
patent: 4938244 (1990-07-01), Kumada et al.
patent: 5038303 (1991-08-01), Kimura
patent: 5066938 (1991-11-01), Kobashi et al.
patent: 5081438 (1992-01-01), Nakahata et al.
patent: 5251981 (1993-10-01), Kreider
patent: 5303594 (1994-04-01), Kurtz et al.
patent: 5362975 (1994-11-01), Von Windheim et al.
patent: 5406081 (1995-04-01), Inushima

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