Measuring device for detecting the dimensions of test samples

Details Measuring device for detecting the dimensions of test samples Measuring device for detecting the dimensions of test samples

2006-08-15

2006-08-15

Pham, Hoa Q. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S511000, C356S241100

Reexamination Certificate

active

07092102

ABSTRACT:
A measuring device for detecting dimensions of bores has a light source emitting a light beam and a beamsplitter for splitting the light beam into a reference beam and a measuring beam. A reference mirror is arranged downstream of the beam splitter. The measuring beam is supplied to a measuring location of the bore and reflected on it. The reference beam is supplied to the reference mirror and reflected on it. The reflected beams are temporally incoherent and are recombined on the beamsplitter to form a recombined beam supplied to a receiver. Reference mirror and receiver have a lateral displacement relative to an optical axis of the measuring device, or the reference mirror is arranged laterally adjacent to the optical axis and the beam splitter at a slant to the optical axis. The measuring device is integrated into a tool or connected to a tool receptacle.

REFERENCES:
patent: 4153370 (1979-05-01), Corey, III
patent: 5434669 (1995-07-01), Tabata et al.
patent: 5810719 (1998-09-01), Toida
patent: 5933237 (1999-08-01), Drabarek
patent: 6462815 (2002-10-01), Drabarek et al.
patent: 6724485 (2004-04-01), Drabarek
patent: 6741355 (2004-05-01), Drabarek
patent: 6822746 (2004-11-01), Prinzhausen et al.

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