Measuring device and method to optically measure an object

Details Measuring device and method to optically measure an object Measuring device and method to optically measure an object

2007-01-25

2010-02-16

Lee, Hwa (Andrew) S (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S486000, C356S487000, C356S493000

Reexamination Certificate

active

07663764

ABSTRACT:
A measuring device for the optic measuring of an object13ais provided, in particular for measuring a motion of the object. The device includes an interferometer20with a measuring beam exit12, a reflection beam entry14, an interfering beam exit15, and a light source1for creating a light beam8, an optic detector16, which is arranged at the interfering beam exit15of the interferometer20such that a light beam exiting the interfering beam exit15impinges the detector and a signal processing unit17connected to the detector16being embodied such that they can measure measuring signals of the detector16. The interferometer (20) is provided with a switched beam entry (18) and is embodied such that dependent on a switching signal connected to a switched beam entry (18) a light beam exits the measuring beam exit (12) essentially with a predetermined light intensity and at a predetermined angle, and that the signal processing unit (17) is provided with a switched beam exit, which is connected to the switched beam entry (18) of the interferometer, with the signal processing unit (17) controlling the interferometer such that a light beam exits the measuring beam exit (12) only during the measuring of measuring signals essentially with a predetermined light intensity and at a predetermined angle.

REFERENCES:
patent: 5317376 (1994-05-01), Amzajerdian et al.
patent: 2007/0002333 (2007-01-01), Ueki et al.
patent: 4313076 (1993-10-01), None
patent: 4414514 (1995-11-01), None

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