Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate
2009-06-03
2011-11-01
Stafira, Michael P (Department: 2886)
Optics: measuring and testing
Shape or surface configuration
C356S626000, C356S241100
Reexamination Certificate
active
08049901
ABSTRACT:
A measuring device includes a light-sending part sending light in a first direction which is a depth direction of a hollow shape, a conversion part converting a direction of the light into a circumference direction approximately orthogonal to the first direction, a detection part detecting light reflected inside a measuring object, the direction of which is converted by the conversion part, and a shape measurement part measuring an inside shape of the measuring object by obtaining a shift from a reference position according to a detection result of the detection part. Thereby, it is possible to obtain the hollow shape of an object at one time without a need of rotating the object or a light source, and to carry out a highly accurate measurement using a simple device.
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Aoki Hiroshi
Komatsu Koichiro
Nikon Corporation
Oliff & Berridg,e PLC
Stafira Michael P
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