Measuring device and measuring method

Details Measuring device and measuring method Measuring device and measuring method

1994-11-18

1998-12-22

Dougherty, Elizabeth L.

Measuring and testing

Volume or rate of flow

Thermal type

G01F 168

Patent

active

058522387

ABSTRACT:
A pulse-like heating is applied to a thin-film material having a high thermal conductivity such as a diamond thin film so that a response characteristic at this time is measured as a change in temperature of the thin film. The response characteristic reflects the thermal influence of the circumstance on the thin-film material, and depends, for example, on the flow rate of fluid. At this time, a sensor for obtaining an output depending on the fluid and the temperature of the fluid and a sensor for obtaining an output corresponding to the temperature of fluid are prepared to compare and process both the output with the result of obtaining an output which reflects the flow rate with accuracy not depending on the temperature.

REFERENCES:
patent: 3085431 (1963-04-01), Yerman et al.
patent: 3425277 (1969-02-01), Adams
patent: 3942378 (1976-03-01), Olmstead
patent: 4043195 (1977-08-01), Hunting
patent: 4135396 (1979-01-01), Stanke et al.
patent: 4888988 (1989-12-01), Lee et al.
patent: 5144380 (1992-09-01), Kimoto et al.

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