Measuring cell as well as constructing methods for a...

Details Measuring cell as well as constructing methods for a... Measuring cell as well as constructing methods for a...

2005-04-27

2009-02-10

Thompson, Jewel (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

Reexamination Certificate

active

07487682

ABSTRACT:
The invention relates to a measuring cell, comprising a support and a sensor, whereby a measuring chamber is arranged between the support and the sensor and the sensor is arranged on the support by means of individual material deposits provided between the support and the sensor. Said material deposits are preferably gold bumps.

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Guo-Wei Xiao et al., “A pressure sensor using flip-chip on low-cost flexible substrate.” 2001 Proceeding 51st, Electronic Components and Technology Conference. ECTC 2001, Orlando, FL, May 29, 2001, Proceedings of the Electronic Components and Technology Conference, New York, NY: IEEE, US, vol. CONF. 51, May 29, 2001, pp. 750-754, XP010547674.

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