Measuring arrangements

Details Measuring arrangements Measuring arrangements

1975-05-16

1977-06-07

Tung, T.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204 1T, 2041292, 2041293, G01N 2746, B23P 100

Patent

active

040282074

ABSTRACT:
The electrochemical measuring technique of the present invention employs, as the barrier material, a concentrated electrolyte, which also forms a medium for the controlled dissolution of a surface of the semiconductor so as to provide a continuous depth profile. The depth profile characteristic may be determined by capacitance-voltage measurements on n-type bulk GaAs, using KOH as the electrolyte.

REFERENCES:
patent: 2851654 (1958-09-01), Haddad
patent: 3117899 (1964-01-01), McLouski
patent: 3250693 (1966-05-01), Amaya
patent: 3303109 (1967-02-01), Just
patent: 3379625 (1968-04-01), Csabi
patent: 3418226 (1968-12-01), Marinace
patent: 3586608 (1971-06-01), Juda et al.
patent: 3660250 (1972-05-01), Duffy
patent: 3755026 (1973-08-01), Reynolds
patent: 3873512 (1975-03-01), Latanision
"Journal of Applied Electrochemistry", 1973, vol., 3, pp. 1-15.
"J. Phys. E: Sci. Instrum.", 1971, vol. 4, pp. 213-221.
"IEEE Trans. Electron Devices", 1969, Ed-16, pp. 445-449.

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