Measuring arrangement for the clear scanning of at least one ref

Details Measuring arrangement for the clear scanning of at least one ref Measuring arrangement for the clear scanning of at least one ref

1984-05-25

1986-08-19

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

33125C, 250237G, 356375, G01B 1114

Patent

active

046066420

ABSTRACT:
A measuring system for measuring the relative position of two objects is provided with a scale which defines reference marks absolutely allocated to a graduation. The graduation and the reference marks are scanned in a scanning unit by associated scanning fields of a scanning plate. For the clear and unambiguous scanning of the reference marks, and for the optimal scanning of the graduation, (1) the optical path length of the light rays between the graduation and the associated scanning fields and (2) the optical path length of the light rays between the reference marks and the associated scanning fields are provided with a phase difference. In this way, the optical path length for multiple scanning paths can be individually optimized.

REFERENCES:
patent: 4403859 (1983-09-01), Ernst
Bremer, Science and Industry No. 16, 1980, pp. 1-5.

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