Measuring apparatus utilizing diffraction of reflected and trans

Details Measuring apparatus utilizing diffraction of reflected and trans Measuring apparatus utilizing diffraction of reflected and trans

1993-04-19

1996-07-30

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356349, 356351, 250237G, G01B 902

Patent

active

055417299

ABSTRACT:
In measuring apparatus for detecting relative displacement of a diffraction grating, a light beam is separated in an optical unit such as polarizing beam splitter into a reflected light beam and a transmitted light beam which beams are projected onto the diffraction grating. The diffracted light of the reflected and transmitted light beams are deflected by a deflection unit to be projected again onto the diffraction grating for rediffraction. The rediffracted light of the reflected and transmitted light beams are combined in the polarizing beam splitter and a detector detects the interference state of the combined rediffracted light. The deflection unit deflects the diffracted light beams of the reflected light and transmitted light so that they reenter the diffraction grating after traveling along the same optical path in the directions opposite to each other. The apparatus provides a simple configuration that prevents reduction of light intensity and provides the same optical path for both reference and displacement measuring light beams so that errors caused by fluctuation in air and heterogeneity in optical components are cancelled.

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"Monomode Optical Fibre Interferometers For Precision Measurement". D. A. Jackson, Intstrument Science and Technology, Dec. 1985, pp. 981-1001.

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