Measuring apparatus, purity controller, and mixing ratio...

Details Measuring apparatus, purity controller, and mixing ratio... Measuring apparatus, purity controller, and mixing ratio...

2005-04-26

2005-04-26

Le, N. (Department: 2858)

Electricity: measuring and testing

Impedance, admittance or other quantities representative of...

Lumped type parameters

C324S658000

Reexamination Certificate

active

06885200

ABSTRACT:
A measuring apparatus correctly measures the purity, mixing ratio, and the like of an insulative (nonconductive) fluid such as ultrapure water flowing through a passage.The apparatus includes first to third sensors (19, 21, 23) to detect capacitance changes on the passage (1a) covered with an insulating resin pipe, a memory (41) to store reference capacitance changes, and a controller (35) to compare the detected capacitance changes with the stored reference capacitance changes, measure a purity of the insulative fluid flowing through the passage, and control the purity of the insulative fluid.

REFERENCES:
patent: 4487057 (1984-12-01), Lutz
patent: 5330783 (1994-07-01), Saidman et al.
patent: 5423206 (1995-06-01), Hetzel
patent: 5790422 (1998-08-01), Power et al.
patent: 10-209108 (1998-08-01), None

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