Measuring apparatus

Details Measuring apparatus Measuring apparatus

2005-04-26

2005-04-26

Font, Frank G. (Department: 2877)

Optics: measuring and testing

Of light reflection

C356S134000, C356S136000, C359S199200, C359S212100, C359S595000

Reexamination Certificate

active

06885454

ABSTRACT:
A measuring apparatus is disclosed which includes a measuring unit equipped with a dielectric block and a thin film layer; an incidence system for making a light beam enter the dielectric block so that a condition for total internal reflection is satisfied at an interface between the dielectric block and the thin film layer; and a photodetector for receiving the light beam totally reflected at the interface. The measuring unit is measured a plurality of times, and a change in the state of attenuated total reflection during the plurality of measurements is detected. The sensor further includes a tilt measurement section for measuring the longitudinal tilt of the interface which changes the incidence angles during the plurality of measurements, and a calculating section for obtaining a measured value in which errors due to the longitudinal tilt have been corrected.

REFERENCES:
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patent: 5255075 (1993-10-01), Cush
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Takayuki Okamoto, “Spectral Researches” vol. 47, No. 1, Dec. 8, 1998, pp. 21-23, 26-27.

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