Measuring apparatus

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G01B 1130

Patent

active

044250410

ABSTRACT:
A measuring apparatus is disclosed in which a surface to be measured is scanned by a scanning beam and the angular deviation of the scanning beam of light regularly reflected from the surface is detected to know the flatness of the surface. The measuring apparatus includes an optical system for projecting the scanning beam obliquely on the surface to increase the amount of the regularly reflected light from the surface so that measurement of the flatness of even such surface containing roughened surface areas or light scattering surface area can be made with the measuring apparatus.

REFERENCES:
patent: 3667846 (1972-06-01), Nater et al.
patent: 3700903 (1972-10-01), Adler et al.
patent: 3857637 (1974-12-01), Obenreder
patent: 3866038 (1975-02-01), Korth
patent: 3885875 (1975-05-01), Rosenfeld et al.

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