Measuring and testing – Vibration – By mechanical waves
Patent
1996-12-11
1997-09-30
Chapman, John E.
Measuring and testing
Vibration
By mechanical waves
73643, 356432T, G01N 2918
Patent
active
056728301
ABSTRACT:
Anisotropic mechanical properties of thin films are measured by exciting time-dependent waveguide acoustic modes in the thin film sample with a pair of excitation pulses from an excitation laser. The waveguide acoustic modes are then optically detected by diffracting a probe laser beam off the excited modes. The probe beam is detected to generate an electronic signal. The anisotropic moduli and related properties in the film are determined by analyzing the electronic signal using a mathematical inversion procedure.
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Dhar Lisa
Nelson Keith A.
Rogers John A.
Chapman John E.
Massachusetts Institute of Technology
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