Measurements using balanced illumination optical microscopy

Details Measurements using balanced illumination optical microscopy Measurements using balanced illumination optical microscopy

1992-05-20

1993-11-09

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250572, 356239, G01J 132

Patent

active

052605582

ABSTRACT:
A technique for measuring the distance between the edges of a feature positioned on a substrate wherein the feature is illuminated with light on either side of the edges and the light intensities at either side of each of the edges are detected and are balanced at the detected light intensities regions sufficiently removed from the edges to prevent an adverse diffractive effect thereon so as to produce regions of minimum light intensity at the edges, the positions of which can be determined and the distance between said regions of minimum intensity can be measured.

REFERENCES:
patent: 3180984 (1965-04-01), Fertig et al.
patent: 4360586 (1982-11-01), Flanders et al.
patent: 4538909 (1985-09-01), Bible et al.
patent: 4890309 (1989-12-01), Smith et al.
patent: 4952058 (1990-08-01), Noguchi et al.
"Practical Method For Edge Detection Focusing For Linewidth Measurements on Wafers"; Optical Engineering; Jan. 1987 vol. 26 No. 1; pp. 81-85.

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