Measurement of thin film porosity

Details Measurement of thin film porosity Measurement of thin film porosity

2011-03-15

2011-03-15

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

Refraction testing

C356S626000, C356S627000, C073S038000, C438S016000

Reexamination Certificate

active

07907264

ABSTRACT:
A method of measuring a porosity of a film, by measuring a refractive index of the film in a first environment having a first relative humidity to produce a first refractive index measurement. The refractive index of the film is measured in a second environment having a second relative humidity, where the first relative humidity is different from the second relative humidity, to produce a second refractive index measurement. Multiple gases can be used to create the first and second environments. The first refractive index measurement and the second refractive index measurement are input into a model that correlates refractive index to film porosity, to output the porosity of the film.

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