Measurement of the thickness of layers of material by ultrasonic

Details Measurement of the thickness of layers of material by ultrasonic Measurement of the thickness of layers of material by ultrasonic

1987-08-03

1989-09-05

Levy, Stewart J.

Measuring and testing

Vibration

By mechanical waves

73579, G01N 2904

Patent

active

048627470

ABSTRACT:
The invention relates to a method for the automatic correction of the variations of efficiency of an electroacoustic transducer as a function of the frequency for improving the accuracy of a device measuring the thickness of layers of materials by ultrasonic interferometry. It is characterized in that:

REFERENCES:
patent: 4068524 (1978-01-01), Lewis et al.
patent: 4512194 (1985-04-01), Beuter
Houze, M., et al., "Measurement of the Thickness of Thin Layers by Ultrasonic Interferometry", J. Appl. Phys., 55(4), Jan. 1, 1984.
Houze, M., et al., "Criteria for the Ultrasonic Measurement of Thickness by Interferometric Methods", J. Appl. Phys., 56(3), Aug. 1, 1984.

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