Measurement of test object with stacked features

Details Measurement of test object with stacked features Measurement of test object with stacked features

2007-03-29

2010-10-19

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

Angle measuring or angular axial alignment

C356S614000

Reexamination Certificate

active

07817259

ABSTRACT:
An apparatus and associated method for measuring spatial characteristics of a test object with stacked features. First and second measurement assemblies for measuring opposing first and second planar features, respectively, of a test object, by directing light beams into a gap between the features to measure a position and a static attitude of each feature.

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