Measurement of surface roughness

Details Measurement of surface roughness Measurement of surface roughness

1977-06-15

1979-03-20

Corbin, John K.

Optics: measuring and testing

By polarized light examination

With birefringent element

356371, G01B 902

Patent

active

041451406

ABSTRACT:
A method and apparatus for measuring surface roughness, waviness, cracks or any irregularities or flatnesses in a surface utilizing statistical properties of dichromatic speckle patterns. In practice surface roughness is normally measured utilizing standard profile measuring devices. However, these instruments are not efficient in practice in view of their slowness for effecting measurements. The present invention provides an improved method of measuring surface roughness including the following steps; generating a spatially coherent polychromatic light having at least two wavelengths and directing the light at an optically rough surface in order to illuminate the same; analyzing intensity variations in two speckle patterns formed at a plane due to two wavelengths of the polychromatic light; and defining and evaluating a difference between intensities of the two speckle patterns as a function of surface roughness of the optically rough surface.

REFERENCES:
patent: 3804521 (1974-04-01), Sprague
Fujii et al., "Measurement of Surface Roughness Properties by Using Image Speckle Contrast", J. Opt. Soc. Am., vol. 66, No. 11, Nov. 1976, pp. 1217-1222.

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