Measurement of multiple surface test objects with frequency...

Optics: measuring and testing – By light interference – Having light beams of different frequencies

Reexamination Certificate

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C356S516000

Reexamination Certificate

active

07986414

ABSTRACT:
A frequency scanning interferometer is arranged for simultaneously measuring multiple surfaces of a test object through a wide range of expected offsets. Knowledge of the expected locations of the test surfaces is compared with a sequence of ambiguity intervals based on a synthetic measurement wavelength to center the test surfaces within the ambiguity intervals.

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Hibino et al; “Multiple-surface Testing by a Wavelength-scanning interferometer for refractive index inhomogeneity measurement”; Optics and Spectroscopy, 2006, vol. 101, No. 1, pp. 18-22.

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