Measurement of multiple surface test objects with frequency...

Details Measurement of multiple surface test objects with frequency... Measurement of multiple surface test objects with frequency...

2011-07-26

2011-07-26

Chowdhury, Tari Fur (Department: 2886)

Optics: measuring and testing

By light interference

Having light beams of different frequencies

C356S516000

Reexamination Certificate

active

07986414

ABSTRACT:
A frequency scanning interferometer is arranged for simultaneously measuring multiple surfaces of a test object through a wide range of expected offsets. Knowledge of the expected locations of the test surfaces is compared with a sequence of ambiguity intervals based on a synthetic measurement wavelength to center the test surfaces within the ambiguity intervals.

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