Measurement of gas leaks into gas lines of a plasma reactor

Details Measurement of gas leaks into gas lines of a plasma reactor Measurement of gas leaks into gas lines of a plasma reactor

1993-06-15

1994-07-05

Hannaher, Constantine

Radiant energy

Invisible radiant energy responsive electric signalling

Ultraviolet light responsive means

156627, 20419213, 20419233, 20429803, 20429832, G01N 2173

Patent

active

053269756

ABSTRACT:
A method for testing for gas leaks in plasma reactors and gas lines introducing gas into the reactor, includes: measuring the intensity of the plasma reactor light emission; introducing known increments of a test gas into the reactor; measuring the intensity of the plasma reactor light emission after each introduction of an increment of test gas into the reactor; producing a curve resulting from the intensity readings vs increments of introduced gas; and performing a regression analysis on the curve to determine a value of gas at which the intensity is equal to zero, which value of gas is the amount of gas that has been leaked into the reactor.

REFERENCES:
patent: 4415402 (1983-11-01), Gelernt et al.
patent: 4493745 (1985-01-01), Chen et al.
patent: 4499752 (1985-02-01), Fruzzetti et al.
patent: 4543481 (1985-09-01), Zwick
patent: 4851683 (1989-07-01), Yang et al.
patent: 4883560 (1989-11-01), Ishihara

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