Measurement of a gas constituent by a mass spectrometer

Details Measurement of a gas constituent by a mass spectrometer Measurement of a gas constituent by a mass spectrometer

1979-09-07

1981-04-07

Dixon, Harold A.

Radiant energy

Ionic separation or analysis

With sample supply means

73 1G, 250252, 250289, B01D 5944

Patent

active

042608864

ABSTRACT:
The accuracy of measurement of a constituent of a small volume of gas (such as the moisture within an integrated circuit package) is improved by improving the accuracy of the calibration of the spectrometer being used to make the measurement. The calibration is achieved by measuring with the spectrometer the known amount of the constituent in a reference sample of about the same size as the small volume of gas in the test sample.

REFERENCES:
patent: 2714164 (1955-07-01), Riggle et al.
patent: 3665748 (1972-05-01), Mator
patent: 4151738 (1979-05-01), Hyer

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