Optics: measuring and testing – By polarized light examination – With light attenuation
Patent
1997-09-30
1999-06-22
Evans, F. L.
Optics: measuring and testing
By polarized light examination
With light attenuation
356384, 25055936, G01B 1102
Patent
active
059147849
ABSTRACT:
A method of determining the edge of an object by microscopy, such as an optical microscopy system or a scanning electron microscopy system. The edge of the object is viewed at a first focus value, and the image signal profile of the object edge is then measured at the first focus value. The object edge is then viewed at a second focus value different from the first focus value and the image signal profile of the object edge is measured at the second focus value. The location of the object edge is determined by comparing the image signal profiles of the object edge at the first and second focus values. For example, determination of the location of the object edge is by an isofocal point of the profiles. Alternatively, prior to the determination of the location of the object edge, the object edge is viewed at a third focus value different from the first and second focus values and the image signal profile of the object edge is measured at the third focus value. Determination of the location of the object edge is then made by calculating the variance of the profiles and determining a minimum of the variance. The object edge may be viewed and the image signal profiles measured at different phases or different light colors, and the determination of the location of the object edge may include comparing the image signal profiles of the object edge at the different phases or different light colors.
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Ausschnitt Christopher P.
Brunner Timothy A.
Evans F. L.
International Business Machines - Corporation
Peterson Peter W.
Townsend Tiffany L.
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