Measurement method, device manufacturing method and...

Details Measurement method, device manufacturing method and... Measurement method, device manufacturing method and...

2007-06-05

2007-06-05

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S072000, C355S075000

Reexamination Certificate

active

10986180

ABSTRACT:
To increase a measurement range of a measurement system taking measurement samples of an object moving with respect to said measurement system, the measurement system is configured to take measurement samples at different sample positions while the object accelerates with respect to the measurement system. In particular, a measurement timing for taking samples is determined corresponding to a selected acceleration and velocity of the object as a function of time with respect to the measurement system.

REFERENCES:
patent: 6233040 (2001-05-01), Sekiguchi
patent: 6493062 (2002-12-01), Tokuda et al.
patent: 2005/0012912 (2005-01-01), Draaijer et al.
patent: 2005/0139790 (2005-06-01), Boogaarts et al.

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