Measurement head for atomic force microscopy and other...

Measuring and testing – Surface and cutting edge testing – Roughness

Reexamination Certificate

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C250S306000, C250S307000

Reexamination Certificate

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06871527

ABSTRACT:
An improvement for atomic force microscopes, more generally for light beam detecting systems, but also in part applicable to scanning probe microscopes, providing significant novel features and advantages. Particular features include using different objective lens regions for incident and reflected light, a flexure that allows three dimensional motion of the optics block, forming the housing and optics block of a composite material or ceramic, arranging the components so that the beam never hits a flat surface at normal incidence, and providing a resonant frequency of cantilever vibration greater than 850 HZ between the cantilever and sample and the cantilever and focusing lens.

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patent: 5825020 (1998-10-01), Hansma et al.
patent: 5874669 (1999-02-01), Ray
patent: 6021665 (2000-02-01), Hayashi et al.
Mario B. Viani, et al., “Small cantilevers for force spectroscopy of single molecules;” Journal of Applied Physics, vol. 86, No. 4, pp. 2258-2262.
Tilman E. Schaffer, et al., “Characterization and optimization of the detection sensitivity of an atomic force microscope for small cantilevers;” Journal of Applied Physics, vol. 84, No. 9, pp. 4661-4666.
Tilman E. Schaffer, et al., “An atomic force microscope for small cantilevers;” SPIE—The International Society for Optical Engineering, vol. 3009, pp. 48-52.
D.A. Walters, et al., “Short cantilevers for atomic force microscopy;” Review of Scientific Instrumentation, vol. 67, No. 10, pp. 3583-3590.
T.E. Schaffer, et al., “Studies of vibrating atomic force microscope cantilevers in liquid;” Journal of Applied Physics, vol. 80, No. 7, pp. 3622-3627.
Deron A. Walters, et al, “Atomic force microscopy using small cantilevers;” SPIE—The International Society for Optical Engineering, vol. 3009, pp. 43-47.
M. B. Viani et al., Fast Imaging and fast force spectroscopy of single biopolymers with a new atomic force microscope designed for small cantilevers, Rev. Sci. Instrum., vol. 70. No. 11, Nov., 1999.

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