Measurement apparatus for measuring surface map

Details Measurement apparatus for measuring surface map Measurement apparatus for measuring surface map

2008-01-30

2009-10-27

Chowdhury, Tarifur (Department: 2886)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

07609389

ABSTRACT:
A measurement apparatus for measuring a surface map comprises an image sensor, an optical system including a reference surface and arranged to form an interferogram of a reflected wavefront from a test surface and that from the reference surface on an image sensing surface of the image sensor and a calculation unit which calculates a surface map of the measurement target based on the interferogram. The calculation unit calculates the surface map of the measurement target by utilizing first data which expresses, by a first coordinate system, data in a state in which a central axis of the test surface is at a first angle to an optical axis of the optical system, and second data which expresses, by a second coordinate system obtained by shifting the first coordinate system, data in a state in which the central axis is at a second angle to the optical axis.

REFERENCES:
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patent: 5986760 (1999-11-01), Nakayama et al.
patent: 7289222 (2007-10-01), Schuster
patent: 2003/0030819 (2003-02-01), Kuechel
patent: 2003/0184763 (2003-10-01), Ueki et al.
patent: 1324006 (2003-07-01), None
patent: 05-223537 (1993-08-01), None
European Patent Office, European Search Report, Jul. 13, 2009.

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