Measurement apparatus for measuring dimensions of semiconductor

Details Measurement apparatus for measuring dimensions of semiconductor Measurement apparatus for measuring dimensions of semiconductor

1994-12-21

1996-06-18

Evans, F. L.

Optics: measuring and testing

By polarized light examination

With light attenuation

356383, 356394, 356237, 348126, 348130, 348131, 382146, 382149, G01B 1100, G01N 2188

Patent

active

055283713

ABSTRACT:
A measurement apparatus includes two mirrors reflecting light rays obtained when a group of leads arranged on one lateral surface of a semiconductor device and a light-shielding band pattern are illuminated in two different directions. The measurement apparatus thus inputs the light rays into a single imaging device without moving the semiconductor device and the transparent mounting plate so that the distance traveled by one light ray from an illumination unit to the imaging device is equal to the distance traveled by the other light ray through the mirror to a second imaging device. Thus, an inexpensive measurement apparatus automatically measures the dimensions of a semiconductor device at high speed using an automatic feeding function and to produces highly accurate measurements.

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