Measurement apparatus, exposure apparatus, and device...

Details Measurement apparatus, exposure apparatus, and device... Measurement apparatus, exposure apparatus, and device...

2008-01-09

2009-08-18

Connolly, Patrick J (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S521000

Reexamination Certificate

active

07576870

ABSTRACT:
A measurement apparatus which measures a wavefront aberration of an optical system to be measured, the apparatus comprises a detection unit configured to detect an interference pattern formed by light having passed through a mask inserted on an object plane of the optical system to be measured, and a mask inserted on an image plane of the optical system to be measured.

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