Measurement apparatus, exposure apparatus, and device...

Details Measurement apparatus, exposure apparatus, and device... Measurement apparatus, exposure apparatus, and device...

2011-06-07

2011-06-07

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S067000

Reexamination Certificate

active

07956987

ABSTRACT:
A measurement apparatus includes a polarization controller which controls polarization of light, a wavefront dividing unit which divides a wavefront of the light, a polarizing unit which polarizes the light, a detector which detects the light, a first driving unit which moves the wavefront dividing unit with respect to the detector, a second driving unit which moves the polarizing unit with respect to the detector, and a processor which calculates the optical characteristics of the detection target using a detection results obtained when the wavefront dividing unit is positioned in the optical path and a detection result obtained when the wavefront dividing unit is positioned outside the optical path.

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patent: WO 03/028073 (2003-04-01), None

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