Optics: measuring and testing – Photometers – Photoelectric
Reexamination Certificate
2011-04-12
2011-04-12
Nguyen, Hung Henry (Department: 2882)
Optics: measuring and testing
Photometers
Photoelectric
C355S053000
Reexamination Certificate
active
07924416
ABSTRACT:
A substrate stage holds a substrate irradiated with exposure light via a liquid. A measurement apparatus measures information on the exposure light and has a light receiving device detachable from the substrate stage. The light receiving device receives the exposure light while being held in the substrate stage.
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Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
Whitesell-Gordon Steven H
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