Data processing: measuring – calibrating – or testing – Measurement system – Measured signal processing
Reexamination Certificate
2011-06-21
2011-06-21
Teixeira Moffat, Jonathan C (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Measured signal processing
C702S151000, C702S191000
Reexamination Certificate
active
07966158
ABSTRACT:
The measurement apparatus includes a distortion correcting unit configured to generate a plurality of correction signals by correcting the plurality of signals using a distortion coefficient which is stored in the apparatus, a square-root of sum of squares arithmetic unit configured to calculate a square-root of sum of squares of the plurality of correction signals, a first normalizing unit configured to generate a plurality of first normalized signals by dividing each of the plurality of correction signals by the square-root of sum of squares, and a phase arithmetic unit configured to calculate the position of the object based on the plurality of first normalized signals.
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Canon Kabushiki Kaisha
Canon U.S.A. Inc. IP Division
Teixeira Moffat Jonathan C
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