Measurement apparatus

Data processing: measuring – calibrating – or testing – Measurement system – Measured signal processing

Reexamination Certificate

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Details

C702S151000, C702S191000

Reexamination Certificate

active

07966158

ABSTRACT:
The measurement apparatus includes a distortion correcting unit configured to generate a plurality of correction signals by correcting the plurality of signals using a distortion coefficient which is stored in the apparatus, a square-root of sum of squares arithmetic unit configured to calculate a square-root of sum of squares of the plurality of correction signals, a first normalizing unit configured to generate a plurality of first normalized signals by dividing each of the plurality of correction signals by the square-root of sum of squares, and a phase arithmetic unit configured to calculate the position of the object based on the plurality of first normalized signals.

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patent: 4458322 (1984-07-01), Veale
patent: 5239490 (1993-08-01), Masaki et al.
patent: 5581488 (1996-12-01), Seo
patent: 2004/0012389 (2004-01-01), Maiwald
patent: 2004/0172208 (2004-09-01), Freitag et al.
patent: 2005/0151532 (2005-07-01), Seki
patent: 2007/0288187 (2007-12-01), Finkler et al.
patent: 01-197266 (1989-08-01), None
patent: 03-071017 (1991-03-01), None
patent: 04-096130 (1992-03-01), None
patent: 04-096131 (1992-03-01), None

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