Measurement apparatus

Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system

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356169, H01J 314

Patent

active

040513670

ABSTRACT:
In an apparatus for measuring relative displacement between first and second members, a grating fixed relative to the first member is illuminated by means defining a spatially periodic optical object fixed relative to the second member. Light transmitted or reflected by the grating is detected by a system including means defining a spatially periodic light-receiving array fixed relative to the second member so as to interact with an interfernce image formed by the grating, the output of the detection system thus varying cyclically upon relative movement between the first and second members.

REFERENCES:
patent: 3427463 (1969-02-01), Weyrauch
patent: 3586665 (1971-06-01), Weyrauch
patent: 3600588 (1971-07-01), Sayce
patent: 3700907 (1972-10-01), Meyer et al.
patent: 3768911 (1973-10-01), Erickson
patent: 3796498 (1974-03-01), Post
patent: 3812352 (1974-05-01), MacGovern

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