Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2003-09-09
2008-01-22
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
Reexamination Certificate
active
07321432
ABSTRACT:
In general, in one aspect, the invention features a method for determining the location of an alignment mark on a stage including measuring a location, x1, of a stage along a first measurement axis using an interferometer, measuring a location, x2, of the stage along a second measurement axis substantially parallel to the first measurement axis, and determining a location of the alignment mark along a third axis substantially parallel to the first measurement axis based on x1, x2, and a correction term, ψ3, calculated from predetermined information including information characterizing imperfections in the interferometer.
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Fish & Richardson P.C.
Turner Samuel A.
Zygo Corporation
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