Chemistry: electrical and wave energy – Apparatus – Electrolytic
Reexamination Certificate
2006-11-28
2006-11-28
Wilkins, III, Harry D (Department: 1742)
Chemistry: electrical and wave energy
Apparatus
Electrolytic
C204S242000
Reexamination Certificate
active
07141146
ABSTRACT:
An electrochemical mechanical process for electroplating or electropolishing a conductive surface of a wafer is provided. The conductive surface of the wafer is touched by a polishing surface of a compressible pad while a process solution flows through the pad and a potential difference is maintained between the conductive surface and an electrode. The pressure between the polishing surface and a central region of the conductive surface is increased by applying a shaping process to either the conductive surface or the pad.
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Basol Bulent M.
Bogart Jeffrey
ASM Nutool, Inc.
Knobbe Martens Olson & Bear LLP
Wilkins, III Harry D
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